紫外激光器213nm激光器

工作方式Operating mode

Pulsed

出光功率Output power (mW)

10

30

功率稳定性Power stability (rms, over 4 hours)

<1%，<3%

脉宽Pulse width (ps)

<50

发散角Beam divergence, full angle (mrad)

<3

束腰光斑Beam diameter (mm)

~2

频率Repetition frequency (MHz)

5

出光口高度Beam height from base plate (mm)

128

制冷方式Cooled method

Air cooled

上升时间Warm-up time (minutes)

<15

工作温度Operating temperature (℃)

15~30

电源Power supply (AC 220V)

220v数显可调