供应耐高温MFM微小气体流量计 热式空气气体质量流量计控制器防腐

MFM-微气体质量流量计

MFM – Micro Gas Mass Flowmeter

使用说明书V1.2

User Manual V1.2

目录

Contents

一、      概述

I. Overview

二、      技术参数

II. Technical Parameters

三、      工作原理

III. Operating Principle

四、      产品特点

IV. Product Feature

五、产品分类与命名

V. Product Classification and Naming

六、      安装与接线

VI. Installation and Wiring

七、      仪表机械尺寸

VII. Mechanical Size of Instrument

八、      输出

VIII. Output

九、      操作界面

IX. Operation Interface

十、      仪表操作方法

X. Operation Method of Instrument

十一、 维护及一般故障处理

XI. Maintenance and Handling of General Failure

十二、 流量计读数比对的注意事项

XII. Precautions for Flowmeter Reading Comparison

十三、 附图一

XIII. Attached Figure I

备注:

Remarks:

取MFM流量计时注意不要直接拿表头,需要连同测试管道一起拿!!!

Do not hold the gauge outfit directly when taking up the MFM flowmeter. It needs to hold the measurement tube together!!!

一、  产品概述

I. Product Overview

采用关键矽微机械加工技术的MS流量传感器具有测量微小、小流量的优势的MEMS（ Microelectromechanical systems）气体质量流量计和流量控制器，主要应用于轻工、化工、环保及半导体等工业部门的空气、氧气、氩气、氮气等气体的检测和控制。

Adopting the key silicon micromechanical process technology, the MS flow sensor has the MEMS (Microelectromechanical systems) gas mass flowmeter and flow controller with the advantage of measuring the micro flow and small flow and is mainly applied to the detection and control of the gases such as the air, oxygen, argon, nitrogen, etc. in the industrial sectors like the light industry, chemical industry, environmental protection, semiconductor, etc.

该产品能替代浮子流量计、孔板流量计等流量计。其特点是可靠性高、重复性好，压损小，无可动部件，量程比宽，响应时间较快，测量精度高，无需要温度压力补偿。

This product can replace the flowmeters such as the float flowmeter, orifice plate flowmeter, etc. Without the movable components and the needs of temperature and pressure compensation, it is featured by the high reliability, good repeatability, and little pressure loss, wide measurement range ratio, relatively fast response time and high measurement accuracy.

二、    技术参数

II. Technical Parameters

2.1  测量介质：各种气体（乙炔气和混合气体除外）

2.1 Measurement medium: Various gases (acetylene gas and mixed gas excluded)

2.2   流量范围：  DN3   100-1000ml/min

2.2 Flow range:     DN4   250-2500ml/min

                      DN6   1000-10000ml/min

                      DN8   1500-15000ml/min

                      DN10  2500-25000ml/min   

                      DN18  10-100SLM     

                注：(a)以 量的测量介质为空气而言；

                Note: (a) The measurement medium of the above flow is the air;

(b)以 量的标准状态20℃，101.325kPa。

(b) The standard state of the above flow is 20℃, 101.325kPa;

(c) 每个口径量程范围均可扩大

(c) The scope of the measurement range of each diameter can be enlarged;

(d)特殊需要可联系厂家单独标定

(d) For special needs, contact the manufacturer for the separate calibration.

2.3   流量测量准确度：±1.5%FS；±2.5%FS

2.3 Accuracy of flow measurement: ±1.5%FS; ±2.5%FS

2.4   工作温度范围：0-55℃；

2.4 Operating temperature range: 0-55℃;

2.5   工作压力范围：0.3MPa，0.6MPa，1.0MPa

2.5 Operating pressure range: 0.3MPa, 0.6MPa, 1.0MPa

2.6   供电电源：24VDC±10%；

2.6 Power supply: 24VDC±10%;

2.7   输出信号：4-20mA，RS485通讯；

2.7 Output signal: 4-20mA, RS485 communication;

2.8   环境温度：0-55℃；

2.8 Environment temperature: 0-55℃;

2.9   显示位数：瞬时流量为三位，累积流量10位。

2.9 Display digit: Three for instantaneous flow and ten for accumulated flow.

三、    工作原理

III. Operating Principle

    uf感热式芯片技术是采用大规模集成电阻的工作，     保证传感器的高度一致，解决了：“现在传统的热式质量流量计无法保证其传感器的电阻值的一致性，导致传感器在各个法线方向热传导速度的差异，所以传统的热式质量流量计在传感器校准和使用过程中产品稳大定性存在问题，实际应用中的热式质量流量计价格昂贵，大规模应用比较难”的问题。而uf感热式芯片的功耗大大小于普通的热式质量流量计，同时可靠性稳定,安全性更好。

μf thermal chip technology guarantees the high-degree consistence of the sensor by the operation of the large-scale integrated resistance, thus solving the following problems: The traditional thermal mass flowmeter is unable to guarantee the consistence of the resistance value of its sensor now, thus resulting in the difference in the speed of the heat conduction between various normal directions of the sensor. So the traditional thermal mass flowmeter has the problem in the stability during the calibration and using process of the sensor, and for the practical application, the thermal mass flowmeter is expensive and difficult to be applied in a large scale. While the power consumption of the μf thermal chip is much less than that of the ordinary thermal mass flowmeter with stable reliability and better safety in the meantime.

在芯片上，一个微热源及分别处于微热源上下游的温度传感器集成在采用MEMS的特有工艺制作的镂空桥面上。采用这这样的桥式方式制作有利于热传导，使动态响应时间大大提高。当传感器工作时，微热源与环境温度之间保持一定的温差（通常是70℃），在芯片周围形成固定的温度场分布。如果气体是单向流动，则在气道中温度场可用下述公式来计算：

On the chip, a micro heat source and the temperature sensors in the upstream and downstream of the micro heat source respectively are integrated on the hollow-out bridge surface fabricated by the specific MEMS technology. Fabricating by such a bridge way helps the heat conduction, thus increasing greatly the dynamic response time. When the sensor is operating, there is a certain temperature difference ( normally  as 70℃) between the micro heat source and environment temperature and the fixed temperature field distribution is formed around the chip. If the gas is flowing in one way, then the temperature field in the gas passage can be calculated by the following formula:

式中：气体流动方向为ｘ，速度为ｖ，ａ为扩散率。

In the formula: The flow direction of the gas is x, the speed is v and the diffusion rate is a.

如上图（式）所示，当气体流过芯片时，将会带走热量，通过质量流量qm和电压V的对应关系来计算流体的质量流量。

As shown in the above figure (formula), when flowing past the chip, the gas will take away the heat and the mass flow of the fluid can be calculated by the corresponding relation between the mass flow qm and voltage V.

四、产品特点

IV. Product Feature

1、产品集成度高，集瞬间流量显示、累计流量显示和信号输出一体，并可实现自动调节、控制阀门。

1. The product has a high integration level, integrating the instantaneous flow display, accumulated flow display and signal output, and can achieve the automatic adjustment and control of the valve.

2、μf微流量感热式传感器采用大规模集成电路生产技术和材料加工技术，使流量计的微流量测量灵敏度显著提升。

2. μf micro-flow thermal sensor adopts the large-scale integrated circuit production technology and material processing technology, thus improving dramatically the micro-flow measuring sensitivity of the flowmeter.

3、微小流量气体测量，ml/min级的微流量测控，实现微小流量测量的数字化。

3. The product can conduct the gas measurement for the micro and small flow and ml/min-level observation and control of the micro flow, thus achieving the digitization of the micro and small flow measurement.

4、单个芯片的 流量特性的微处理技术，使流量计的量程范围大大提高。

4. The micro processing technology for the excellent flow characteristic of the single chip increases greatly the scope of the measurement range of the flowmeter.

5、机电一体化优化设计，智能化的数据处理技术，使流量计具有更好的重复性，实现了计量的准确、可靠。

5. The mechatronic optimization design and intelligent data processing technology make the flowmeter possess better repeatability, thus achieving the measuring accuracy and reliability.

5、结构的优化，MFM流量计的压力损失达到 小化。

5. The structural optimation minimizes the pressure loss of the MFM flowmeter.

6、采用国际 新的MF传感技术，使流量计工作更稳定、可靠。

6. The latest international MF sensor technology adopted makes the operation of the flowmeter be more stable and reliable.

7、 零点自校功能，测量更准确。

7. The original zero self-calibration function makes the measurement be more accurate.

8、多种气体实际标定，全量程补偿。

8. Conduct the actual calibrations for various gases and the compensation for the full measurement range.

9、快速响应、数据自动存储，配合上位机可实现网络集中管理。

9. With the functions of fast response and automatic data storage, the network centralization management can be achieved by coordinating with the upper computer. 

10、规格齐全，量程范围宽，可根据用户要求单独标定。

10. The product has a complete range of the specifications and wide scope of the measurement range and can be calibrated separately according to the requirements of the user.

11、精度等级高，满足用户高精度测量要求。

11. The high accuracy grade can satisfy the requirement for high-accuracy measurement of the user.

12、独有的流量计报警功能，使监控更可靠。

12. The exclusive alarm function of the flowmeter makes the monitoring be more reliable.

13、操作、设置界面友好、简便，可根据需要自行设定相关参数。

13. The operation and setting interfaces are user-friendly and simple, and the relevant parameters can be set voluntarily.

14、运用行业多，是科研院所、分析仪表行业、半导体行业、光伏行业、玻璃镀膜、石油化工行业微小气体流量控制产品升级换代的 。

14. The product can be applied in many industries and is the first choice for the upgrading and updating of the flow controlling product of the micro gas in the scientific research institutions, analyzer industry, semiconductor industry, photovoltaic industry, glass film coating industry and petroleum chemical industry.

五、产品分类与命名

V. Product Classification and Naming     

微气体质量流量计的型号命名

Model and Naming of Micro Gas Mass Flowmeter

六、安装与接线

VI. Installation and Wiring

7.1       安装注意事项

7.1 Installation Precautions

安装时必须注意场合，不能安装于管路有杂质的地方；

Must pay attention to the locations during the installation and the product can not be installed in the place of the pipeline having the impurities;

安装时应使流量计上的流向标志所示方向与流体流动方向一致；

The direction instructed by the flow direction sign on the flowmeter shall be the same with the flow direction of the fluid during the installation;

7.2   上游管道应有10D（D为管道内径）的直管段，下游应有5D的后直管；

7.2 There shall be 10D (D is the internal diameter of the pipeline) straight pipe in the upstream pipeline and 5D rear straight pipe in the downstream pipeline.

7.3   仪表安装处的管道内应光滑清洁，无突出，流量调节阀应安装在流量计的下游；

7.3 The inside of the pipeline where the instrument is installed shall be smooth and clean without any extrusions and the flow regulating valve shall be installed in the downstream of the flowmeter.

7.4   仪表水平安装，安装使用中严防漏气；

7.4 The instrument shall be installed horizontally and air leakage shall be prevented strictly during the installation and use.

七、 仪表的机械尺寸

VII. Mechanical Size of Instrument

八、输出

VIII. Output

PIN1：报警输出2

PIN1: Alarm Output 2

      PIN2：报警输出1

PIN2: Alarm Output 1

     PIN4：RS485B

   PIN4: RS485B

     PIN5：RS485A

   PIN5: RS485A

     PIN11：电源负端（0V）

   PIN11: Negative Terminal of Power Supply (0V)

     PIN12：电断正端（24V）

   PIN12: Positive Terminal of Power Supply (24V)

      PIN14：LOOP-  

   PIN14: LOOP-

     PIN15：LOOP+

   PIN15: LOOP+

      PIN3、6~10、13：信号地（报警信号参考地）

PIN3, 6-10, 13: Signal Ground (Reference Ground of Alarm Signal)

8.1 电源连接 Power Connection

24VDC

GND

8.2 报警连接 Alarm Connection

报警输出1/2  Alarm Output 1/2 报警输出参考地 Reference Ground of Alarm Output

    8.3 RS485连接 RS485 Connection

RS485-A

RS485-B

  8.4 4-20mA输出连接 4-20mA Output Connection

LOOP+(4-20mA输出正) LOOP+(4-20mA Output: Positive)

                      LOOP-(电流输出负) LOOP- (Current Output: Negative)

九、操作界面

IX. Operation Interface

                                                                                                            累积流量Accumulated Flow

         面板示意图

Schematic Diagram of Panel

有两种,图1是                                         There are two diagrams, Diagram 1 is

                                                                                                              瞬时流量 Instantaneous Flow

报警功能有无With or Without Alarm Function                                         流量显示的百分比 Flow Percentage Displayed

若有，后面就显示警铃

If any, the alarm bell will be displayed behind.

                                                              图1   显示界面 Diagram 1 Display Interface

  图 2   参数设定界面

Diagram 2 Parameter Setting Interface

十、仪表操作方法

X. Operation Method of Instrument

10.1  在不设置的情况下如图1所示，屏上排显示累积流量，中排显示瞬时流量，下排显示报警和量程百分数。

10.1 The instrument is shown as Diagram 1 under the condition of no setting up: The upper line displays the accumulated flow; the middle line displays the instantaneous flow; the bottom line displays the alarm and the percentage of measurement range.

10.2  按    或   键，上排滚动查看各项参数（如图2所示），下排固定显示瞬时流量。

10.2 Press or   key. Scroll the upper line to view various parameters (as shown in Diagram 2) and the bottom line displays the instantaneous flow regularly.

10.3  要修改参数必须先输入密码，然后才可修改参数。 单查看参数不须输入密码，可滚动查看各项参数。

10.3 The password must be entered before modifying the parameters. There is no need to enter the password for just viewing the parameters and various parameters can be view by scrolling.

10.4  进入某查看参数后，按    键就进入了该参数的修改状态， 高位开始闪烁，这时按   键或   键就可使该位数字减少或增加。再按     键，第2位开始闪烁…… 。

10.4 After viewing a certain parameter, press     key to modify such parameter. The first digit will start to flash. Press  or   key to minus or add that figure. And then press     key, the second digit will start to flash…….

10.5  当某参数修改好后，连按二次      键，该参数修改值就被确认了。再按  或  键，可查看再其它参数。

10.5 After modifying a certain parameter, double-press the     key and the modified value of such parameter is confirmed. And then press   or   key to view other parameters.

10.6  当按了     键后，数据开始闪烁，但又不想修改该参数，只要按一次     键，就退了该参数设置态，再按    键或   键就可继续查看其它参数。

10.6 After pressing    key, the digit will start to flash. If you do not want to modify that parameter, just press     key to quit the setting status of that parameter and press  or   key to continue to view other parameters.

10.7   连按三次      键，就退出参数设定状态，返回到图1显示状态。再想修改参数，则重新输入密码。

10.7 Press     for three times continuously to quit the setting status of the parameter and return to the display status in Diagram 2. If you want to modify the parameters again, enter the password again.

10.8       参数设置错误：

10.8 Wrong Parameter Setting:

参数设定值超出表中规定的范围，则闪烁报警提示。

If the set value of the parameter goes beyond the scope specified in the table, the alarm will flash to alarm.

10.9       计量单位的改变

10.9 Change of Measurement Unit

      工作模式选项1的第2位为计量单位选择，计量单位由mL改为L，或由L改为mL，仪表不对量程设定值、瞬时量设定值、累积量设定值乘1000或除1000的自动转换操作，因为转换总会产生误差，也会大到溢出，或小到看不见，因此计量单位改变后必须对上述三个参数重新设定。

The second place in the option 1 of the operating mode is used for the selection of the measurement unit. The measurement unit can be changed from mL to L or from L to mL. The instrument does not conduct the following automatic conversion operation: Multiply or divide the set values of the measurement range, instantaneous flow and accumulated flow by 1000, for the conversion always generates the errors and the values will overflow or be too small to be seen. Thus, the above-mentioned three parameters must be reset after the measurement unit is changed.

10.10     零点调试模式

10.10 Zero Debugging Mode

      工作模式选项3：000100的第六位0改成1，如100100，然后连按二次      键,零点调试完成。（备注，零点调试务必注意管道里无任何气体流动）

Option 3 of operating mode: Change the sixth figure 0 of 000100 as 1, such as 100100 and double press     key, then the zero debugging is completed. (Remarks: It's important to note that no gas is allowed to flow inside the pipeline when conducting the zero debugging.)

10.11     参数设置一览表

10.11 Parameter Setting List

微流量 参数设置一览表

Parameter Setting List of Micro Flow

          2

注：非相关工程人员不得改动该项目下的参数，否则，可能造成仪表的工作异常！

Note: The personnel who are irrelevant with the engineering shall not modify the parameters of that item, or the instrument may work abnormally.

十一、  维护及一般故障处理

XI. Maintenance and Handling of General Failure

11.1 安装使用

11.1 Installation and Use

             产品用于有害气体或者爆炸性气体需严格按照产品使用说明书书的限制。有关产品的 近消息，都可以与生产厂家及时联系。强腐蚀性或者氟化物气体可能影响流量计的正常使用，甚至对产品造成毁损，所以在这样场合的下禁止使用。

If the product is used for the harmful or explosive gases, it needs to operate strictly according to the restrictions stated in the user manual of the product. For the latest news of the product, contact the manufacturer in time. The gases with strong corrosivity or fluoride gases may influence the normal use of the flowmeter and even damage the product, thus it is forbidden to use the product in such occasions.

            产品在出厂之前做过耐压测试，在高压状态下使用必须产品使用说明的限制，否则容易导致泄露及安全问题。

The product has been undergone the test of the pressure resistance before leaving the factory. When using the product under the state of the high pressure, you must know the restrictions stated in the user manual of the product, or it is easy to result in the leakage and safety problems.

11.2     保修

11.2 Warranty

               产品必须在使用说明书规定的正常工作条件下以正确的方法安装、使用并维护保养，对产品质量问题，从发货之日起提供免费的365天的保修。

注意：未经过厂家许可任意改动或不当使用本产品可导致不可预见的损失、人员伤害及其他有害后果。公司将对产品造成不良的后果不承担任何责任。

The product must be installed, used and maintained by the correct methods under the normal operating conditions stated in the user manual. For the product quality problems, our company provides the warranty for 365 days for free starting from the delivery date. Note: Unpredictable losses, personnel injuries or other harmful consequences may be generated if modifying arbitrarily without the permission of the manufacturer or misusing this product. The company will not bear any responsibility for the negative effects on the products.

11.3     故障分析及处理

11.3 Failure Analysis and Handling

十二、  流量计读数比对的注意事项

XII. Precautions for Flowmeter Reading Comparison

12.1     仪表的标准状态

12.1 Standard State of Instrument

仪表显示的流量为标准状态20℃、101.325kPa的状态下，用空气作为标定介质标定的标准流量，单位为Nm³/h。

The flow displayed by the instrument is the standard flow under the standard state of 20℃, 101.325kPa with the air as the calibration medium and the unit as Nm³/h.

12.2     读数比对方法

12.2 Method of Reading Comparison

               如果是同样状态同样条件下的介质，对应的流量和显示流量是一致的。但如果介质不同，对应的标准流量可能不一致。

If the media are of the same state and condition, the corresponding flow and the flow displayed will be consistent. However, if the media are not the same, the corresponding standard flow may not be consistent.

附录：气体密度表（仅供参考）

Appendix: Table of Gas Density (Just for Reference)